Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390635 | Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same | Sung-Gi Kim, Joong Jin PARK, Byeong-il YANG, Se Jin JANG, Gun Joo PARK +4 more | 2022-07-19 |
| 11393676 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2022-07-19 |
| 11358974 | Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2022-06-14 |
| 11319333 | Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same | Sung-Gi Kim, Se Jin JANG, Byeong-il YANG, Joong Jin PARK, Sang-Do Lee +4 more | 2022-05-03 |