Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390635 | Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same | Sung-Gi Kim, Joong Jin PARK, Byeong-il YANG, Se Jin JANG, Jeong Joo PARK +4 more | 2022-07-19 |
| 11319333 | Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same | Sung-Gi Kim, Se Jin JANG, Byeong-il YANG, Joong Jin PARK, Sang-Do Lee +4 more | 2022-05-03 |