Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393676 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2022-07-19 |
| 11358974 | Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2022-06-14 |
| 11319333 | Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same | Sung-Gi Kim, Se Jin JANG, Byeong-il YANG, Joong Jin PARK, Jeong Joo PARK +4 more | 2022-05-03 |
| 11322501 | Semiconductor device and method for fabricating the same | Jeong-Yeop Lee, Dong Su Park, Jong-Bum Park, Jae Min Lee, Kee-Jeung Lee +1 more | 2022-05-03 |
| 11217592 | Semiconductor device and method for fabricating the same | Jeong-Yeop Lee, Dong Su Park, Jong-Bum Park, Jae Min Lee, Kee-Jeung Lee +1 more | 2022-01-04 |