Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281114 | Projection exposure apparatus for semiconductor lithography | Jens Kugler, Mark Feygin, Bernhard Gellrich, Stefan Hembacher | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281114 | Projection exposure apparatus for semiconductor lithography | Jens Kugler, Mark Feygin, Bernhard Gellrich, Stefan Hembacher | 2022-03-22 |