Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526089 | Compensation of creep effects in an imaging device | Marwene Nefzi, Stefan Troeger, Ralf Zweering, Konrad Carl Steimer | 2022-12-13 |
| 11281114 | Projection exposure apparatus for semiconductor lithography | Jens Kugler, Mark Feygin, Stefan Xalter, Bernhard Gellrich | 2022-03-22 |