Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314177 | Supporting an optical element | Bernhard Geuppert, Alexander Kharitonov | 2022-04-26 |
| 11281114 | Projection exposure apparatus for semiconductor lithography | Mark Feygin, Stefan Xalter, Bernhard Gellrich, Stefan Hembacher | 2022-03-22 |