Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347142 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2022-05-31 |
| 11320731 | Membrane for EUV lithography | Pieter-Jan Van Zwol, Dennis De Graaf, Paul Janssen, Mária Péter, Willem Joan Van Der Zande +2 more | 2022-05-03 |
| 11294291 | Lithographic apparatus | Johannes Hubertus Josephina Moors | 2022-04-05 |
| 11287753 | Cleaning apparatus and methods of cleaning | — | 2022-03-29 |