Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320731 | Membrane for EUV lithography | Pieter-Jan Van Zwol, Paul Janssen, Mária Péter, Marcus Adrianus Van De Kerkhof, Willem Joan Van Der Zande +2 more | 2022-05-03 |
| 11237475 | EUV pellicles | Zomer Silvester HOUWELING, Chaitanya Krishna ANDE, Thijs KATER, Michael Alfred Josephus KUIJKEN, Mahdiar Valefi | 2022-02-01 |