Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Jeroen Hubert Rommers, Hubertus Johannes Van De Wiel +20 more | 2022-05-24 |
| 11294291 | Lithographic apparatus | Marcus Adrianus Van De Kerkhof | 2022-04-05 |