Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Hubertus Johannes Van De Wiel +20 more | 2022-05-24 |