Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2022-03-01 |
| 11243470 | Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method | Nitish Kumar, Adrianus Johannes Hendrikus Schellekens, Sietse Thijmen Van Der Post, Willem Coene, Peter Danny Van Voorst +2 more | 2022-02-08 |
| 11237484 | Metrology tools comprising aplanatic objective singlet | — | 2022-02-01 |