Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527403 | Methods for filling a gap feature on a substrate surface and related semiconductor structures | Leo Salmi, Mikko Ritala | 2022-12-13 |
| 11499222 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala | 2022-11-15 |
| 11499227 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Timo Hatanpää, Mikko Ritala | 2022-11-15 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Anton Vihervaara, Mikko Ritala | 2022-11-08 |
| 11410851 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2022-08-09 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2022-07-19 |
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Miika Mattinen, Mikko Ritala | 2022-02-08 |