Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Mikko Ritala, Markku Leskelä | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Mikko Ritala, Markku Leskelä | 2022-02-08 |