Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499222 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2022-11-15 |
| 11499227 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Mikko Ritala, Markku Leskelä | 2022-11-15 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2022-11-08 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2022-07-19 |