Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Mark Hawkins, Loren Jacobs | 2022-07-19 |
| 11264255 | Pre-clean chamber and process with substrate tray for changing substrate temperature | John Tolle | 2022-03-01 |