Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Eric Hill, Loren Jacobs | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Eric Hill, Loren Jacobs | 2022-07-19 |