Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11374112 | Method for depositing a group IV semiconductor and related semiconductor device structures | Joe Margetis | 2022-06-28 |
| 11264255 | Pre-clean chamber and process with substrate tray for changing substrate temperature | Eric Hill | 2022-03-01 |