Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532466 | Part-life estimation utilizing feature metrology | Chien-Min Liao, Yao-Hung YANG, Tom K. Cho, Hsiu Yang, Chun-Chung Chen | 2022-12-20 |
| 11521839 | Inline measurement of process gas dissociation using infrared absorption | Ramesh Gopalan | 2022-12-06 |
| 11398369 | Method and apparatus for actively tuning a plasma power source | Rongping Wang, Tom K. Cho | 2022-07-26 |