Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521839 | Inline measurement of process gas dissociation using infrared absorption | Siamak Salimian | 2022-12-06 |
| 11373890 | Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing | — | 2022-06-28 |
| 11355325 | Methods and systems for monitoring input power for process control in semiconductor process systems | Hemant P. Mungekar, Guomin Mao, Rongping Wang, Teryl Pratt | 2022-06-07 |