Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437262 | Wafer de-chucking detection and arcing prevention | Ganesh Balasubramanian, Byung Chul Yoon | 2022-09-06 |
| 11355325 | Methods and systems for monitoring input power for process control in semiconductor process systems | Ramesh Gopalan, Guomin Mao, Rongping Wang, Teryl Pratt | 2022-06-07 |