Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532466 | Part-life estimation utilizing feature metrology | Chien-Min Liao, Yao-Hung YANG, Siamak Salimian, Hsiu Yang, Chun-Chung Chen | 2022-12-20 |
| 11398369 | Method and apparatus for actively tuning a plasma power source | Rongping Wang, Siamak Salimian | 2022-07-26 |
| 11359722 | Multinode multi-use O-ring and method for forming a seal | Shagun P. Maheshwari, Yao-Hung YANG, King F. Lee, Andrew Yu, Aniruddha Pal +1 more | 2022-06-14 |