Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365476 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Praket P. Jha, Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim +2 more | 2022-06-21 |