Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532497 | High power electrostatic chuck design with radio frequency coupling | Vijay D. Parkhe, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2022-12-20 |
JC
Jaeyong Cho
Overall (2022): #420,098 of 548,613Top 80%
1
Patents 2022