Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488806 | L-motion slit door for substrate processing chamber | — | 2022-11-01 |
| 11488852 | Methods and apparatus for reducing high voltage arcing in semiconductor process chambers | Anwar Husain, Kartik Ramaswamy | 2022-11-01 |
| 11424096 | Temperature controlled secondary electrode for ion control at substrate edge | Kartik Ramaswamy, Anwar Husain | 2022-08-23 |
| 11384838 | Seal member | Ippei Nakagawa, Nobuhiro Yoshida | 2022-07-12 |