Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488852 | Methods and apparatus for reducing high voltage arcing in semiconductor process chambers | Hamid Noorbakhsh, Kartik Ramaswamy | 2022-11-01 |
| 11424096 | Temperature controlled secondary electrode for ion control at substrate edge | Hamid Noorbakhsh, Kartik Ramaswamy | 2022-08-23 |