Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-09-20 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-03-22 |
| 11276594 | Systems, apparatus, and methods for an improved load port backplane | Paul B. Reuter | 2022-03-15 |