Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371141 | Plasma process apparatus with low particle contamination and method of operating the same | Tuqiang Ni, Rason Zuo, Shenjian Liu, Lei Wan | 2022-06-28 |
| 11348763 | Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus | Zengdi Lian, Rason Zuo, Dee H. Wu, Yu Guan, Shenjian Liu +1 more | 2022-05-31 |