Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348763 | Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus | Rason Zuo, Dee H. Wu, Yu Guan, Xingjian CHEN, Shenjian Liu +1 more | 2022-05-31 |