Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482664 | Planarization method | Lieng Loo, Yilei Wu | 2022-10-25 |
| 11332364 | Method for forming MEMS cavity structure | Wooicheang Goh, Shrowthi S. N. Bharadwaja | 2022-05-17 |
| 11305988 | Method for preparing silicon wafer with rough surface and silicon wafer | Wooicheang Goh, Lieng Loo | 2022-04-19 |
| 11310606 | MEMS microphone | Bei Tong, Zhan Zhan, Yang Li, Xiaohui Zhong, Lian Duan | 2022-04-19 |