Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332364 | Method for forming MEMS cavity structure | Shrowthi S. N. Bharadwaja, Kahkeen Lai | 2022-05-17 |
| 11305988 | Method for preparing silicon wafer with rough surface and silicon wafer | Lieng Loo, Kahkeen Lai | 2022-04-19 |