Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Qin Chen, Ron Serisky, Julian G. Blake, David J. Chipman | 2021-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Qin Chen, Ron Serisky, Julian G. Blake, David J. Chipman | 2021-07-20 |