Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Steven M. Anella, Qin Chen, Ron Serisky, Julian G. Blake | 2021-07-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Steven M. Anella, Qin Chen, Ron Serisky, Julian G. Blake | 2021-07-20 |