Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133213 | Deflectable platen and associated method | Ming Yin | 2021-09-28 |
| 11069554 | Carbon nanotube electrostatic chuck | Steven M. Anella, Qin Chen, Ron Serisky, Julian G. Blake, David J. Chipman | 2021-07-20 |
| 10949158 | Screenshot method and apparatus | Liang Fang, Yanqing Jing, Xifeng Yang, Yan Huang, Jun Yang | 2021-03-16 |