Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170973 | Temperature control for insertable target holder for solid dopant materials | Shreyansh Patel, Graham Wright, Daniel Alvarado, Daniel R. Tieger, Brian S. Gori +2 more | 2021-11-09 |
| 10892136 | Ion source thermal gas bushing | Adam M. McLaughlin | 2021-01-12 |