Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11127558 | Thermally isolated captive features for ion implantation systems | Jordan B. Tye | 2021-09-21 | $69,558,000 |
| 10892136 | Ion source thermal gas bushing | Craig R. Chaney | 2021-01-12 |