Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211267 | Substrate processing apparatus and substrate processing method | Hakuba Kitagawa, Takaumi Morita | 2021-12-28 |
| 11195849 | Semiconductor device and method of manufacturing the same | Yuji Setta, Masaru Kito | 2021-12-07 |
| 11171022 | Substrate treatment apparatus and method of manufacturing semiconductor device | Hakuba Kitagawa, Fuyuma Ito, Hiroyuki Tanizaki | 2021-11-09 |
| 11152334 | Semiconductor device and method of manufacturing the same | Yusuke Tanaka, Atsushi Hieno, Tsutomu Nakanishi, Masayoshi Tagami | 2021-10-19 |
| 11145670 | Semiconductor storage device and manufacturing method thereof | Tomohiko Sugita | 2021-10-12 |