Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211267 | Substrate processing apparatus and substrate processing method | Yasuhito Yoshimizu, Takaumi Morita | 2021-12-28 |
| 11171022 | Substrate treatment apparatus and method of manufacturing semiconductor device | Yasuhito Yoshimizu, Fuyuma Ito, Hiroyuki Tanizaki | 2021-11-09 |