Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171022 | Substrate treatment apparatus and method of manufacturing semiconductor device | Hakuba Kitagawa, Yasuhito Yoshimizu, Hiroyuki Tanizaki | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171022 | Substrate treatment apparatus and method of manufacturing semiconductor device | Hakuba Kitagawa, Yasuhito Yoshimizu, Hiroyuki Tanizaki | 2021-11-09 |