Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099479 | Resist composition, method of forming resist pattern, polymeric compound, and copolymer | Hideto Nito, Masafumi FUJISAKI, Tatsuya Fujii, Yuki FUKUMURA, Takahiro Kojima +3 more | 2021-08-24 |
| 11067888 | Resist composition and method of forming resist pattern | Emi Uchida, Tsuyoshi Nakamura | 2021-07-20 |
| 11036131 | Resist composition, method of forming resist pattern, and compound | Tsuyoshi Nakamura, Kazuishi Tanno | 2021-06-15 |
| 11036132 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Kazuishi Tanno, Tsuyoshi Nakamura, Masafumi FUJISAKI | 2021-06-15 |