Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150554 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Junyeob Lee | 2021-10-19 |
| 11036131 | Resist composition, method of forming resist pattern, and compound | Takashi Nagamine, Tsuyoshi Nakamura | 2021-06-15 |
| 11036132 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Tsuyoshi Nakamura, Masafumi FUJISAKI | 2021-06-15 |