Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099479 | Resist composition, method of forming resist pattern, polymeric compound, and copolymer | Takashi Nagamine, Hideto Nito, Tatsuya Fujii, Yuki FUKUMURA, Takahiro Kojima +3 more | 2021-08-24 |
| 11036132 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kazuishi Tanno, Tsuyoshi Nakamura | 2021-06-15 |
| 10921711 | Resist composition and method of forming resist pattern | Junichi Tsuchiya, Kotaro Endo | 2021-02-16 |