Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11188058 | Adjusting method for imprint apparatus, imprinting method, and article manufacturing method | Kunihiko Asada, Kenta Sasa | 2021-11-30 |
| 11119122 | Position correction method, inspection apparatus, and probe card | Kunihiro Furuya | 2021-09-14 |
| 10935884 | Pattern forming method and methods for manufacturing processed substrate, optical component and quartz mold replica as well as coating material for imprint pretreatment and set thereof with imprint resist | Keiko Chiba, Toshiaki Ando, Toshiki Ito, Timothy Brian Stachowiak, Weijun Liu | 2021-03-02 |
| 10915032 | Cleaning apparatus, imprint apparatus, lithography apparatus, and cleaning method | — | 2021-02-09 |