Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119122 | Position correction method, inspection apparatus, and probe card | Shingo Ishida | 2021-09-14 |
| 11061071 | Wafer inspection system, wafer inspection apparatus and prober | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2021-07-13 |
| 10976364 | Test head and wafer inspection apparatus | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2021-04-13 |