Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061071 | Wafer inspection system, wafer inspection apparatus and prober | Junichi Hagihara, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2021-07-13 |
| 10976364 | Test head and wafer inspection apparatus | Junichi Hagihara, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2021-04-13 |