Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935884 | Pattern forming method and methods for manufacturing processed substrate, optical component and quartz mold replica as well as coating material for imprint pretreatment and set thereof with imprint resist | Keiko Chiba, Shingo Ishida, Toshiki Ito, Timothy Brian Stachowiak, Weijun Liu | 2021-03-02 |