Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049721 | Method and process for forming memory hole patterns | Akiteru Ko, Anton J. deVilliers | 2021-06-29 |
| 10978300 | Methods to reduce gouging for core removal processes using thermal decomposition materials | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-04-13 |
| 10950442 | Methods to reshape spacers for multi-patterning processes using thermal decomposition materials | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-03-16 |
| 10916428 | Method to transfer patterns to a layer | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-02-09 |