Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11032899 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Shojiro Yahata | 2021-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11032899 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Shojiro Yahata | 2021-06-08 |