SY

Shojiro Yahata

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #258,832 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11032899 Plasma processing apparatus and plasma processing method Yohei Uchida, Tetsuji Sato, Taira Takase 2021-06-08