Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211278 | Substrate processing apparatus and substrate processing method | Akihiro Teramoto, Suguru Enokida, Keisuke Sasaki | 2021-12-28 |
| 11199785 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Hiroki Sato, Ippei Hamada | 2021-12-14 |
| 11079691 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Hiroki Sato, Ippei Hamada | 2021-08-03 |