Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199785 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Hiroki Sato | 2021-12-14 |
| 11079691 | Coating and developing apparatus and coating and developing method | Tsuyoshi Watanabe, Masashi Tsuchiyama, Hiroki Sato | 2021-08-03 |